ASML Spinout Invisix Bags €20m Seed Round for Chip Metrology
Invisix, a semiconductor metrology company developing next-generation measurement tools for advanced chip manufacturing, has raised an oversubscribed €20 million seed round. The ASML spinout Invisix seed round drew backing from Hitachi Ventures, Transition Ventures, imec.xpand, Doosan Investment Co., and a tier-one semiconductor manufacturer.
Invisix was founded in 2025 by ASML alumni and PhD physicists Christina Porter, serving as CEO, and Sietse van der Post, serving as CTO, to commercialise over a decade of soft x-ray metrology research and development.
Why Chip Makers Are Watching Closely
The problem Invisix is solving is both technical and deeply financial. Modern chips are likened to tiny skyscrapers engineers stack thin layers on top of each other, and each one needs to be almost perfectly shaped and positioned to work. If one tiny feature is in the wrong place, an entire wafer could be wasted. Conventional optical tools can no longer keep up.
When optical tools fall short, manufacturers tend to use slower and destructive alternatives such as cutting the wafer open to assess the placement of features destroying the sample, and that can only be done on a fraction of wafers. Invisix is building a non-destructive alternative using soft x-ray scatterometry.
According to CEO Christina Porter, the growing complexity and three-dimensional nature of advanced semiconductors is driving demand for a new generation of metrology tools capable of inspecting critical internal structures without damaging devices.
Invisix will use the funding to grow its team, build its first shippable system, and run customer demonstrations from a new Eindhoven cleanroom.
The company’s technology is based on High Harmonic Generation (HHG), a process rooted in scientific discoveries recognised by the 2023 Nobel Prize in Physics. For a seed-stage hardware company, that pedigree is rare and investors are clearly paying attention.
